C - Chemistry – Metallurgy – 08 – L
Patent
C - Chemistry, Metallurgy
08
L
400/1208, 400/13
C08L 101/00 (2006.01) C08F 291/18 (2006.01) C08K 5/00 (2006.01) G03F 7/027 (2006.01)
Patent
CA 1168792
Abstract of the Disclosure This invention relates to an improvement in a mixture which is polymerizable by radiation and contains, as the essential constituents, (a) a polymeric binder, (b) a polymerization initiator which can be activated by radiation, and (c) a compound of the formula I Image in which R1 is a divalent aliphatic group having 1 to 15 carbon atoms which also can be partially replaced by hetero-atoms, a divalent cycloaliphatic group having 3 to 15 carbon atoms, or a mixed aliphatic-aromatic group having 7 to 15 carbon atoms, and A is an electron-attracting radical. The invention also relates to a radiation-sensitive resist material using the improved radiation-polymerizable mixture.
367477
Horn Klaus
Sander Jurgen
Fetherstonhaugh & Co.
Hoechst Aktiengesellschaft
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