Modular v-cvd diffusion furnace

Details Modular v-cvd diffusion furnace Modular v-cvd diffusion furnace

C - Chemistry, Metallurgy

30

B

148/3

C30B 31/06 (2006.01) C23C 16/455 (2006.01) C30B 31/10 (2006.01) C23C 16/44 (2006.01)

Patent

CA 1247504

ABSTRACT A novel modular V-CVD diffusion furnace includes a cylindrical quartz diffusion tube having integral end flanges, a first metallic sealing plate having gas ports removably fastened to one flange, a second metallic sealing plate having a plurality of precisely aligned gas injection tube receiving apertures removably fastened to the other flange, a like plurality of gas injection tubes slidably mounted in and sealed to corresponding gas injection tube receiving apertures, and a cylindrical quartz liner slidably mounted in the cylindrical diffusion tube.

467886

Affiliated with

Also associated with

Rating

Modular v-cvd diffusion furnace does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Modular v-cvd diffusion furnace, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Modular v-cvd diffusion furnace will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1241973