Modular vapor processor system

Details Modular vapor processor system Modular vapor processor system

H - Electricity

01

L

356/187

H01L 21/02 (2006.01) H01L 21/00 (2006.01)

Patent

CA 2005571

ABSTRACT A system for multichamber processing of semiconductor wafers providing flexibility in the nature of processing available in a multi processing facility. To accommodate changing processing demands and chamber replacement, a mobile processing chamber selectively docks with a multiple chamber system to form one of its processing chambers. The capabilities of the multiprocessing multichamber system are enhanced by extending the system to other multichamber systems through intermediate buffer storage wafer cassette and elevator systems. The extended multichamber system is further provided with intermediate access wafer storage elevator cassettes.

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