Moisture sealing of optical waveguide devices with doped...

G - Physics – 02 – B

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117/157, 117/86,

G02B 1/10 (2006.01) C23C 14/10 (2006.01) C23C 14/20 (2006.01) G02B 6/10 (2006.01) G02B 6/122 (2006.01) G02B 6/138 (2006.01)

Patent

CA 2040682

51 TITLE MOISTURE SEALING OF OPTICAL WAVEGUIDE DEVICES WITH DOPED SILICON DIOXIDE HAVING A SILICON MONOXIDE UNDERCOAT ABSTRACT Optical waveguide devices which have improved barrier properties after having been coated sequentially with silicon monoxide and silicon dioxide doped with certain metals.

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