Molecular beam epitaxy apparatus

Details Molecular beam epitaxy apparatus Molecular beam epitaxy apparatus

C - Chemistry, Metallurgy

30

B

356/148, 356/178

C30B 23/02 (2006.01) C23C 14/56 (2006.01) C30B 29/40 (2006.01) H01L 21/00 (2006.01) H01L 21/20 (2006.01) H01L 21/677 (2006.01)

Patent

CA 1333038

A molecular beam epitaxy apparatus comprises a growth chamber provided therein with a holder support frame and connected via a first gate valve to a preparation chamber which in turn is connected to a loading chamber via a second gate valve. A first transfer tray arranged in the loading chamber receives a set of substrates from outside and advances into the preparation chamber. A second transfer tray supports a substrate holder in the preparation chamber to allow the set of substrates to be transferred from the first tray onto the holder by the aid of a substrate transfer assembly. The second tray is advanced into the growth chamber to transfer the loaded holder onto the holder support frame.

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