Monolithic silicon devices and method for making same

Details Monolithic silicon devices and method for making same Monolithic silicon devices and method for making same

H - Electricity

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356/141, 356/165

H01L 23/29 (2006.01) H01L 21/00 (2006.01) H01L 21/314 (2006.01) H01L 21/762 (2006.01)

Patent

CA 926022

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