Mosfet substrate sensitivity control

Details Mosfet substrate sensitivity control Mosfet substrate sensitivity control

H - Electricity

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356/126

H01L 29/78 (2006.01) H01L 21/265 (2006.01) H01L 29/10 (2006.01) H01L 29/167 (2006.01)

Patent

CA 1130473

MOSFET SUBSTRATE SENSITIVITY CONTROL Abstract The sensitivity of the threshold voltage in MOSFET devices to changes in substrate voltage may be reduced at a given temperature by the introduction of sufficiently deep energy level, low diffu- sivity impurities into the depletion region under the gate of the MOSFET. Y0978-020

337644

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