Mould parts of silicon nitride and method for producing such...

C - Chemistry – Metallurgy – 30 – B

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C30B 15/10 (2006.01) C04B 35/584 (2006.01) C30B 11/00 (2006.01) C30B 15/00 (2006.01)

Patent

CA 2492176

The present invention relates to silicon nitride mould parts, particularly crucibles for use in connection with directional solidification and pulling of silicon single crystals. The mould parts consist of Si3N4 having a total open porosity between 40 and 60% by volume and where more than 50% of the pores in the surface of the mould parts have a size which is larger than the means size of the Si3N4 particles. The invention further relates to a method for producing the silicon nitride mould parts.

La présente invention concerne des pièces moulées en nitrure de silicium, en particulier des creusets s'utilisant pour la solidification directionnelle et le tirage de monocristaux de silicium. Ces pièces moulées sont faites de Si¿3?N¿4? avec porosité ouverte totale comprise entre 40 et 60 % en volume et dont plus de 50 % des pores en surface ont une taille supérieure à la taille moyenne des particules de Si¿3?N¿4?. L'invention concerne en outre un procédé de fabrication pour pièces moulées en nitrure de silicium.

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