Movable member mounting

G - Physics – 02 – B

Patent

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88/113, 345/57

G02B 6/38 (2006.01) G01J 3/26 (2006.01) G02B 26/02 (2006.01) G02B 26/04 (2006.01) G02B 26/08 (2006.01) G02F 1/21 (2006.01) H01S 3/10 (2006.01)

Patent

CA 1277525

MOVABLE MEMBER MOUNTING ABSTRACT The invention relates to the mounting of a movable member such as an optical mirror (3) by bridges (4-7) between a pair of supports (1,2). The supports (1,2), bridges (4-7) and mirror (3) are integrally formed from a silicon substrate. A pair of electrically conductive paths (8,9) are formed by doping or metallising portions of the assembly so that by passing controlled currents through the paths, thermal expansion of parts of the paths will cause deflection of the mirror (3). The assembly is particularly useful for deflecting optical beams.

520799

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