Multi-layer superhard film structure

Details Multi-layer superhard film structure Multi-layer superhard film structure

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B32B 7/02 (2006.01) B24D 3/00 (2006.01) B32B 9/00 (2006.01) C23C 16/26 (2006.01) C23C 16/27 (2006.01) C23C 16/50 (2006.01) C23C 30/00 (2006.01) C30B 29/04 (2006.01)

Patent

CA 2044543

DF-2534 ABSTRACT A multi-layer diamond film is grown by d.c. arc assisted plasma deposition. A series of layers are deposited on each other by periodically back-etching the surface and renucleating during deposition. There may also be deposited a thin layer of non-diamond carbon material between the diamond layers, but no other non-carbon material. Renucleation is controlled by varying the proportion of methane to hydrogen in the feed gases, by temperature cycling of the substrate, or by inducing modal changes in the arc.

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