Multi-probe test head

Details Multi-probe test head Multi-probe test head

G - Physics

01

R

G01R 1/067 (2006.01) G01B 7/34 (2006.01)

Patent

CA 2281932

According to the invention, a group of probes in a test head for a scanning probe microscope for testing integrated electronic circuits without contact is placed on a support, said probes having been manufactured by three-dimensional additive lithography. The probes are directed at a central point above the probe group. The conductive probes and the foot end of the capacitive probe are connected to conductor structures on the base for connection to a measuring circuit.

Selon l'invention, une tête témoin pour microscope à balayage pour effectuer des tests sans contact sur des circuits électroniques intégrés, consiste en un groupe de sondes disposées sur un support et produites par lithographie additive tridimensionnelle. Les sondes sont orientées sur un point central au-dessus du groupe de sondes. Les sondes conductrices, ainsi que l'extrémité du pied de la sonde capacitives sont connectées avec des structures conductrices sur le support, en vue d'un raccordement à un circuit de mesure.

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