Multi-spectrum photodiode devices

H - Electricity – 01 – L

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H01L 31/12 (2006.01) H01L 27/144 (2006.01) H01L 31/11 (2006.01) H04B 10/158 (2006.01)

Patent

CA 1138081

MULTI-SPECTRUM PHOTODIODE DEVICES ABSTRACT OF THE INVENTION One or more photoelectric device elements are formed beneath the surface of a monolithic semiconductor structure below a surface photoelectric detector device to form a plurality of photoelectric devices having different spectral responses. The surface element is responsive to visible light and the one or more subsurface devices are sensitive to longer wavelength radiation depending upon the depth of the device below the surface of the structure. A two dimensional array of the devices may be formed in a single semiconductor wafer to provide a self-scanning multi-element photosensor array.

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