B - Operations – Transporting – 23 – K
Patent
B - Operations, Transporting
23
K
B23K 26/02 (2006.01) B23K 26/03 (2006.01) B23K 26/06 (2006.01) G01R 15/00 (2006.01) G01R 31/04 (2006.01) G01R 31/28 (2006.01) G02B 5/30 (2006.01) G02B 7/00 (2006.01) G02F 1/35 (2006.01) G02F 1/37 (2006.01) H01L 21/66 (2006.01) G02F 1/13 (2006.01)
Patent
CA 2182358
A probe station which includes a base machine (10), a probe platen (17) mounted on the base machine (10), and a single passive air cooled Nd:YAG laser (100), mounted with a microscope (22). The single laser supplies an output beam to a first non-linear crystal (106) for generating the second harmonic of the fundamental output wavelength. A mirror (107) then directs the beam at a 90 degree angle through a polarizer (108) to repolarize the fundamental wavelength. The beam then passes to a second non-linear crystal (109) for generating the third and fourth harmonic of the fundamental wavelength. A reflecting mirror (111) then directs the beam to a variable attenuator (112) to select the appropriate output wavelength in the infrared (1064 nm), in the green (532 mm), or in the ultraviolet (355 or 266 mm).
Station d'essai comportant une machine de base (10), une platine d'essai (17) montée sur la machine de base et un unique laser passif Nd YAG (100) refroidi par air et monté conjointement avec un microscope (22). Le laser envoie son faisceau sur un premier cristal non linéaire (106) de façon à produire le second harmonique de sa longueur d'onde de sortie fondamentale. Un miroir (107) dirige ensuite le faisceau selon un angle de 90~ à travers un polariseur (108) qui repolarise la longueur d'onde fondamentale. Le faisceau passe ensuite dans un second cristal non linéaire (109) de façon à produire le second et le troisième harmonique de la longueur d'onde fondamentale. Un miroir réfléchissant (111) renvoie alors le faisceau vers un atténuateur variable (112) afin de sélectionner la longueur d'onde de sortie appropriée entre l'IR (1064 nm), le vert (532 nm), ou l'UV (355 ou 266 nm).
Herbst Richard Linsley
Leong Tony P.
North Edward S.
Kirby Eades Gale Baker
New Wave Research
LandOfFree
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