Multilayer ceramic coatings from silicate esters and metal...

Details Multilayer ceramic coatings from silicate esters and metal... Multilayer ceramic coatings from silicate esters and metal...

C - Chemistry, Metallurgy

23

C

117/128, 6/222,

C23C 16/30 (2006.01) C04B 41/52 (2006.01) H01L 21/314 (2006.01) H01L 21/316 (2006.01) H01L 21/318 (2006.01) H01L 23/29 (2006.01) H01L 23/31 (2006.01)

Patent

CA 1329739

MULTILAYER CERAMIC COATINGS FROM SILICATE ESTERS AND METAL OXIDES ABSTRACT This invention relates to materials produced by diluting in a solvent a preceramic mixture of a partially hydrolyzed silicate ester and a metal oxide precursor selected from the group consisting of an aluminum alkoxide, a titanium alkoxide, and a zirconium alkoxide. The preceramic mixture solvent solution is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2/metal oxide coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.

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