Multilayer ceramics from hydrogen silsesquioxane

Details Multilayer ceramics from hydrogen silsesquioxane Multilayer ceramics from hydrogen silsesquioxane

C - Chemistry, Metallurgy

23

C

117/110, 117/128

C23C 16/30 (2006.01) C04B 41/50 (2006.01) C04B 41/52 (2006.01) C04B 41/87 (2006.01) C04B 41/89 (2006.01) H01L 21/314 (2006.01) H01L 21/316 (2006.01) H01L 21/318 (2006.01) H01L 21/312 (2006.01)

Patent

CA 1329737

MULTILAYER CERAMICS FROM HYDROGEN SILSESQUIOXANE ABSTRACT This invention relates to materials produced by diluting in a solvent a hydrogen silsesquioxane resin solvent solution which is applied to a substrate and ceramified by heating. One or more ceramic coatings containing silicon carbon, silicon nitrogen, or silicon carbon nitrogen can be applied over the ceramified SiO2 coating. A CVD or PECVD top coating can be applied for further protection. The invention is particularly useful for coating electronic devices.

549577

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