Multilayer circuit devices and manufacturing methods using...

H - Electricity – 01 – L

Patent

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H01L 21/288 (2006.01) H01L 21/48 (2006.01)

Patent

CA 2595402

A multilayer circuit includes a dielectric base substrate, conductors formed on the base substrate and a vacuum deposited dielectric thin film formed over the conductors and the base substrate. The vacuum deposited dielectric thin film is patterned using sacrificial structures formed by electroplating techniques. Substrates formed in this manner enable significant increases in circuit pattern miniaturization, circuit pattern reliability, interconnect density and significant reduction of over-all substrate thickness.

L'invention concerne un circuit multicouche comprenant un substrat de base diélectrique, des conducteurs formés sur le substrat de base et un film diélectrique mince déposé sous vide par-dessus les conducteurs et le substrat de base. Le film diélectrique mince déposé sous vide est imprimé au moyen de structures sacrificielles formées à l'aide de techniques de galvanisation. Les substrats ainsi formés permettent d'augmenter significativement la miniaturisation et la fiabilité des motifs de circuit, et la densité d'interconnexion et de réduire significativement l'épaisseur globale du substrat.

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