Multilayer structure, used in particular as a material with...

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B - Operations, Transporting

32

B

B32B 15/20 (2006.01) B32B 9/00 (2006.01) C23C 16/40 (2006.01) H01L 21/28 (2006.01) H01L 21/316 (2006.01) H01L 29/51 (2006.01) C23C 16/44 (2006.01)

Patent

CA 2415312

Structure multicouche, utilisée notamment en tant que matériau de forte permittivité relative, caractérisée en ce qu'elle comporte une pluralité de couches distinctes, chacune d'une épaisseur inférieure à 500 .ANG., et réalisée à base de dioxyde d'hafnium (HfO2), de dioxyde de Zirconium (ZrO2) et d'alumine (Al2O3). En pratique, les couches de dioxyde d'hafnium, de dioxyde de Zirconium et d'alumine forment des alliages de formule Hf x ZrAl y O z. Avantageusement, la st~chiométrie des alliages Hf x ZrAl y O z varie d'une couche à l'autre.

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