Multilayer structure, used in particular as a material with...

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B - Operations, Transporting

32

B

B32B 15/20 (2006.01) B32B 9/00 (2006.01) C23C 16/40 (2006.01) H01L 21/28 (2006.01) H01L 21/316 (2006.01) H01L 29/51 (2006.01) C23C 16/44 (2006.01) H01L 21/02 (2006.01)

Patent

CA 2415309

Structure multi-couches, utilisée notamment en tant que matériau de forte permitivité relative, caractérisée en ce qu'elle comporte une pluralité de couches élémentaires superposées, d'une épaisseur inférieure chacune à 500 .ANG., parmi lesquelles figurent deux couches à base d'un alliage de dioxyde de titane (TiO 2) et pentoxyde de tantale Ta 2 O 5) séparées par une couche intercalaire d'un alliage à base au moins de dioxyde d'hafnium (HfO 2) et d'alumine (Al 2 O 3).

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