Multiple electron-beam vapor source assembly

Details Multiple electron-beam vapor source assembly Multiple electron-beam vapor source assembly

H - Electricity

01

J

327/5

H01J 37/305 (2006.01)

Patent

CA 1101076

ABSTRACT OF THE DISCLOSURE Disclosed is a vapor source assembly comprising a means for supporting at least one material to be vaporized, a plurality of electron-beam guns for producing electron beams, and a de- flecting means for producing a magnetic field to deflect each electron beam through an arcuate path from its electron-beam gun to the material to be vaporized. The deflecting means includes a plurality of pairs of pole pieces positioned such that a north pole piece and a south pole piece, are on opposite sides of each electron-beam gun, and a plurality of magnetic means including magnets for interconnecting the south pole piece of each succes- sive electron-beam gun with the north pole piece of the next successive electron-beam gun so as to form a single magnetic circuit. In preferred embodiments, the electron-beam guns are positioned below the maximum level of material in a cluster of crucibles, and two long pole pieces extend on opposite sides of the crucibles, but no pole piece extends between adjacent cru- cibles. A magnetic means for sweeping the electron beams may also be included.

293950

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