Multiple inlet vacuum pumps

F - Mech Eng,Light,Heat,Weapons – 04 – D

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F04D 19/04 (2006.01) F04D 29/52 (2006.01)

Patent

CA 2748323

First and second pump stages provide a flow-path from an inlet to the outlet (30), the flow-path being arranged so that molecules entering the first inlet (26) pass to the outlet through the first (120) and second (122) pump stage, and so that molecules entering the second inlet (28) pass to the outlet through an inter- stage volume (121) and second pump stage (122); wherein the first (120) and second (122) pump stages each comprise a turbo- molecular sub-stage (120a, 122a) and a molecular drag sub-stage (120b, 122b).

Des premier et second étages de pompe fournissent un chemin d'écoulement depuis une entrée vers la sortie (30), le chemin d'écoulement étant conçu de sorte que les molécules entrant par la première entrée (26) traversent les premier (120) et second (122) étages de pompe jusqu'à la sortie, et de sorte que les molécules entrant par la seconde entrée (28) traversent un volume inter-étage (121) et le second étage de pompe (122) jusqu'à la sortie. Les premier (120) et second (122) étages de pompe comprennent chacun un sous-étage turbo-moléculaire (120a, 122a) et un sous-étage de traînée moléculaire (120b, 122b).

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