Multiple sextupole system for the correction of third and...

Details Multiple sextupole system for the correction of third and... Multiple sextupole system for the correction of third and...

H - Electricity

01

J

313/35.32

H01J 29/56 (2006.01) H01J 37/153 (2006.01)

Patent

CA 1187543

ABSTRACT A means is provided for compensating for third and higher order aberration in charged particle beam devices. The means includes two sextupoles with an intermediate focusing lens, all positioned between two focusing lenses.

399544

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