Multisensor piezoelectric elements and a method for making...

Details Multisensor piezoelectric elements and a method for making... Multisensor piezoelectric elements and a method for making...

H - Electricity

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356/200, 73/67

H01L 41/04 (2006.01) G01L 1/16 (2006.01) H01L 41/113 (2006.01) H01L 41/22 (2006.01)

Patent

CA 1317478

ABSTRACT OF THE DISCLOSURE A piezoelectric sensing element is formed from bonding two piezoelectric layers with an intermediate metallic film. The intermediate metallic film is comprised of two separate films, which were sputtered onto the inner surfaces of the respective piezoelectric layers, which are then placed in contact with each other. The combination of piezoelectric layers and film is next heated at an elevated temperature for fusing the respective sputtered alloy films so that the piezoelectric layers are bonded into a piezo-pair sensor. The layers to be joined are chamfered so that the center electrode appears as a notch on the finished piezo-pair to allow a connection to the center electrode for poling and sensing.

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