Nano-electromechanical filter

Details Nano-electromechanical filter Nano-electromechanical filter

H - Electricity

03

H

H03H 9/46 (2006.01) H03H 9/15 (2006.01)

Patent

CA 2414354

The invention concerns a filter comprising, on a substrate (2) at least a microtip (4) extending through a beam-shaped nanostructure (6). The microtip and the nanostructure are conductive, at least a the surface. The nanostructure forms an electromechanical resonator. At least an input electrode (16) and at least an output electrode (18) are formed on an insulating layer, on either side of the microtip, proximate to the tip thereof. The input electrode receives the signal to be filtered and the output electrode supplies a filtered signal. The invention is applicable in particular to wireless telecommunications.

Ce filtre comprend, sur un substrat (2), au moins une micropointe (4) se prolongeant par une nanostructure (6) en forme de poutre. La micropointe et la nanostructure sont, au moins superficiellement, conductrices. La nanostructure forme un résonateur électromécanique. Au moins une électrode d'entrée (16) et au moins une électrode de sortie (18) sont formées sur une couche isolante, de part et d'autre de l'axe de la micropointe, au voisinage du sommet de celle- ci. L'électrode d'entrée reçoit un signal à filtrer et l'électrode de sortie fournit un signal filtré. L'invention s'applique notamment aux télécommunications sans fil.

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