H - Electricity – 01 – J
Patent
H - Electricity
01
J
H01J 37/317 (2006.01) B82B 3/00 (2006.01) H01J 37/20 (2006.01)
Patent
CA 2642874
Nanofabrication installation comprising: a specimen holder, for holding a specimen; a mask, having a through-opening between the upper and lower faces of the mask, for letting charged particles through onto the specimen holder; a near-field detection device for detecting a relative position between the mask (8) and the specimen holder (3); and a displacement device for generating a relative movement between the mask (8) and the specimen holder (3) independently of the relative position between the source (1) and the mask (8), the mask including at least a first electrode in the through-opening (10).
Installation de nano- fabrication comprenant : - un porte-échantillon recevant un échantillon, - un masque comprenant une ouverture traversante entre les faces supérieure et inférieure du masque, laissant passer des particules chargées en direction du porte-échantillon, - un dispositif de détection en champ proche détectant une position relative du masque (8) et du porte- échantillon (3) , - un dispositif de déplacement générant un mouvement relatif du masque (8) et du porte-échantillon (3) indépendamment de la position relative de la source (1) et du masque (8) , le masque comprenant au moins une première électrode au niveau de l'ouverture traversante (10) .
Centre National de La Recherche Scientifique-Cnrs
Osler Hoskin & Harcourt Llp
LandOfFree
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