Nanolithography with use of viewports

Details Nanolithography with use of viewports Nanolithography with use of viewports

G - Physics

03

F

G03F 7/00 (2006.01)

Patent

CA 2678943

Two dimensional arrays of cantilevers for use in transferring inks from the cantilever tip to substrates are improved with use of viewports to view the cantilevers from a far side. This improves the leveling behavior when large numbers of cantilevers are present. It also provides for better laser access. Bioarrays and combinatorial applications are particularly important. Massively parallel direct write printing with more than 55,000 cantilever tips can be achieved.

Des réseaux de bras en deux dimensions employés pour transférer des encres de la pointe des bras sur des substrats sont rendus plus efficaces grâce à l'ajout de fenêtres de visualisation permettant de voir les bras de loin. Cela améliore le nivellement dans les applications utilisant un grand nombre de bras, et donne un accès plus facile au laser. Les bio-réseaux et les applications combinatoires sont particulièrement importants. Grâce à cette invention, il est possible d'obtenir une impression à écriture directe massivement parallèle avec plus de 55 000 pointes de bras.

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