Narrow band excimer laser apparatus

Details Narrow band excimer laser apparatus Narrow band excimer laser apparatus

H - Electricity

01

S

H01S 3/13 (2006.01) H01S 3/08 (2006.01) H01S 3/106 (2006.01) H01S 3/137 (2006.01) H01S 3/225 (2006.01)

Patent

CA 2043556

ABSTRACT A narrow band excimer laser which includes a polarizer for linearly polarizing an oscillation laser beam. The polarizer also includes a birefringence filter which forms the oscillation laser beam into a narrow band.

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