Natural lithographic fabrication of microstructures over...

Details Natural lithographic fabrication of microstructures over... Natural lithographic fabrication of microstructures over...

H - Electricity

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117/64, 204/96.0

H01L 21/306 (2006.01) B41M 5/24 (2006.01) G03F 7/004 (2006.01) G03F 7/16 (2006.01) H01L 21/308 (2006.01)

Patent

CA 1196308

ABSTRACT OF THE DISCLOSURE Large area random and mosaic arrays of identi- cal submicron microcolumnar structures can be produced on surfaces by directionally ion etching a monolayer film of spherical colloidal particles.

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