Near-field optical microscope

Details Near-field optical microscope Near-field optical microscope

G - Physics

01

Q

G01Q 60/18 (2010.01)

Patent

CA 2170860

The invention relates to a near-field optical microscope, in particular to a scanning near-field optical microscope (SNOM), comprising means for determining the intensity of light emerging from the near-field at a direction differing from the direction perpendicular to the surface of the sample to be examined, preferably emerging at an angle .theta. larger than the critical angle. Superposing light with different azimuth angles ? by using suitable positioned mirrors and beamsplitters enables imaging with higher contrast. The invention allows an accurate control of the distance between the probing tip of the SNOM and the sample by using the measured intensity in a feedback loop.

L'invention se rapporte à un microscope optique en champ proche, en particulier à un microscope optique en champ proche à balayage (SNOM) comprenant des moyens destinés à déterminer l'intensité de lumière provenant du champ selon une direction différant de la direction perpendiculaire à la surface de l'échantillon à examiner, de préférence provenant selon un angle .theta. supérieur à l'angle critique. Lorsqu'on superpose la lumière avec différents angles Ø d'azimut grâce à l'utilisation de miroirs et de dispositifs de fractionnement de rayons placés de manière adéquate, on peut obtenir une formation d'image au contraste plus important. L'invention permet de commander précisément la distance entre l'embout de sondage du microscope optique à balayage (SNOM) et l'échantillon en utilisant l'intensité mesurée dans la boucle de retour.

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