H - Electricity – 01 – J
Patent
H - Electricity
01
J
204/96.05
H01J 27/14 (2006.01) H01J 37/08 (2006.01) H01J 37/305 (2006.01)
Patent
CA 1111801
NEGATIVE ION EXTRACTOR Abstract of the Disclosure Process and apparatus for use in extracting negative ions from a plasma which is particularly useful in reactive ion etching of metals, silicon and oxides and nitrides of silicon in the manufacture of semiconductor devices. A magnetic field is employed in the apparatus and, herein, is created by a novel grid, through which negative ions pass to a surface, such as one to be etched, while free electrons are prevented from passing through the grid and out of the plasma. The novel process utilizes negative ions which have a large fraction in the atomic state.
311728
Keller John H.
Mckenna Charles M.
International Business Machines Corporation
Na
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