Negative-working, non-swelling resist

Details Negative-working, non-swelling resist Negative-working, non-swelling resist

G - Physics

03

F

96/150

G03F 7/26 (2006.01) G03F 7/004 (2006.01) G03F 7/031 (2006.01)

Patent

CA 1254431

-0- NEGATIVE-WORKING, NON-SWELLING RESIST Abstract There are disclosed negative-working resist compositions featuring a binder and a radiation- sensitive compound that loses HX upon exposure, to become less soluble in an aqueous base. X is selected from the group consisting of -CN, halide, and -SO2R1, and R1 is alkyl of 1-5 carbon atoms or aryl of from 6 to 10 carbon ring atoms.

486602

Affiliated with

Also associated with

Rating

Negative-working, non-swelling resist does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Negative-working, non-swelling resist, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Negative-working, non-swelling resist will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFCA-PAI-O-1166818