Nitrate polymers as positive resists

Details Nitrate polymers as positive resists Nitrate polymers as positive resists

G - Physics

03

F

96/172, 96/266

G03F 7/039 (2006.01)

Patent

CA 1044068

NITRATED POLYMERS AS POSITIVE RESISTS Abstract of the Disclosure Positive resists are made using polymers and copolymers of methacrylic acid, methacrylic anhydride, methyl methacrylate, methacrylimide, and N-alkyl-methacrylimides which have been nitrated in up to about 10% of the monomer units on the methyl groups branching off the polymer chain. Inclusion of the nitro groups results in an increase of over an order of magnitude in the speed of development of images when the polymers are used as positive resists.

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