Nitride products and method and apparatus for their production

Details Nitride products and method and apparatus for their production Nitride products and method and apparatus for their production

C - Chemistry, Metallurgy

01

B

261/1, 23/195, 2

C01B 21/06 (2006.01) B01J 12/02 (2006.01) C01B 21/068 (2006.01) C04B 35/58 (2006.01)

Patent

CA 2020508

A method and apparatus are provided for producing a product comprising a nitride compound, such as for example silicon nitride. A reactor is provided which has a chamber defined therein which is divided into a combustion zone and a reaction zone. A combustible mixture is injected into the combustion zone and accordingly combusted to form hot combustion products. At least one reactant (i.e. silane) is injected at the boundary between the zones so as to be carried into the reaction zone by the combustion products and react to form raw product comprising the nitride compound. The raw product can be purified by subsequent processing to remove oxygen and convert by-products to the desired nitride compound. The product of the invention has a low level of impurties and is made up of primarily submicron, highly uniform particles. This makes the product particularly useful for fabrication of sintered ceramic parts.

Méthode et appareil pour produire un produit contenant un composé de nitrure, tel le nitrure de silicium par exemple. Un réacteur a une chambre comportant une zone de combustion et une zone de réaction. Un mélange combustible est injecté dans la zone de combustion où il est brûlé pour former des produits de combustion chauds. Au moins un réactif (p. ex. le silane) est injecté à la limite entre les deux zones de manière à être entraîné dans la zone de réaction par les produits de combustion et réagir pour former un produit brut contenant le composé de nitrure. Le produit brut peut être purifié dans un traitement subséquent en vue d'enlever l'oxygène et de convertir les sous-produits qui deviendront le composé de nitrure souhaité. Le produit de la présente invention a une faible teneur en impuretés et se compose principalement de particules submicroniques hautement uniformes. Ceci rend le produit particulièrement utile à la fabrication de pièces de céramique frittée.

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