Nitride removal method

Details Nitride removal method Nitride removal method

C - Chemistry, Metallurgy

23

C

148/26, 204/96.0

C23C 14/40 (2006.01) C23F 1/12 (2006.01) C23G 5/00 (2006.01)

Patent

CA 2002861

NITRIDE REMOVAL METHOD Abstract of the Disclosure A method for removing nitride coatings from metal tooling and mold surfaces without damaging the underlying base metal includes placing the nitride coated metal surface into a plasma reactor and subjecting it to a gaseous plasma comprising a reactive fluorine species. The reactive fluorine species may be derived from one or more of many well known gases. An optional step of cleaning the nitride coating is recommended.

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