Nitride semiconductor device

H - Electricity – 01 – L

Patent

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H01L 33/32 (2010.01) H01S 5/042 (2006.01)

Patent

CA 2298491

The present invention is directed to a nitride semiconductor device used chiefly as an LD and an LED element . In order to improve the output and to decrease Vf, the device is given either a three-layer structure in which a nitride semiconductor layer doped with n-type impurities serving as an n-type contact layer where an n-electrode is formed is sandwiched between undoped nitride semiconductor layers; or a superlattice structure of nitride. The n-type contact layer has a carrier concentration exceeding 3 x 10 18 cm-3, and the resistivity can be lowered below 8 x 10 -3 .OMEGA. cm.

L'invention concerne un dispositif à semi-conducteur en nitrure utilisé surtout comme élément de diode laser et de diode électroluminescente. Afin d'améliorer la sortie et de réduire Vf, on dote le dispositif soit d'une structure à trois couches dans laquelle une couche de semi-conducteur en nitrure dopée avec des impuretés de type n servant de couche de contact de type n dans laquelle une électrode n est formée est placée entre des couches de semi-conducteurs en nitrure non dopées, soit d'une structure à super-réseau en nitrure. La couche de contact de type n présente un concentration de porteurs excédant 3 x 10<18>cm<-3>, et sa résistivité peut être inférieure à 8 x 10<-3> OMEGA cm.

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