Non-aminic photoresist adhesion promoters for...

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B - Operations, Transporting

05

D

B05D 3/10 (2006.01) C03C 17/30 (2006.01) G03F 7/075 (2006.01) H01L 21/312 (2006.01)

Patent

CA 2205549

A method for providing a substrate having improved adherence for polymeric films is disclosed. The method entails reacting at least one organosilane compound having at least one alkylsilyl moiety therein and at least one hydrolyzable group capable of reacting with the substrate to silylate the substrate. Hydrolyzable by-products from the reaction, if any, have a pH less than or equal to about 7.

On décrit un procédé qui permet d'obtenir un substrat à adhérence améliorée pour les pellicules en polymère. Ce procédé consiste à établir une réaction à laquelle participe au moins un composé d'organosilane, qui comprend au moins une fraction d'alkyle silyle, et au moins un groupe hydrolisable pouvant réagir avec le substrat en vue d'obtenir une silylation dudit substrat. Les sous-produits hydrolisables issus de la réaction, le cas échéant, ont un pH inférieur ou égal à 7 environ.

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