Non-destructive semiconductor wafer probing system using...

Details Non-destructive semiconductor wafer probing system using... Non-destructive semiconductor wafer probing system using...

G - Physics

01

R

356/118, 356/188

G01R 31/28 (2006.01) G01R 31/26 (2006.01) G01R 31/311 (2006.01) G01R 31/265 (2006.01)

Patent

CA 2020733

Electrical devices are characterized by optically triggering an electrical signal onto the device and then optically sampling the electrical signal waveform on the device.

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