Noncontact full-line dynamic ac tester for integrated circuits

Details Noncontact full-line dynamic ac tester for integrated circuits Noncontact full-line dynamic ac tester for integrated circuits

G - Physics

01

R

356/118

G01R 15/12 (2006.01) G01R 31/308 (2006.01)

Patent

CA 1232975

NONCONTACT FULL-LINE DYNAMIC AC TESTER FOR INTEGRATED CIRCUITS ABSTRACT OF THE DISCLOSURE Simultaneous noncontact testing of voltages across a full line of test sites on an integrated circuit chip-to-test is achieved with high time resolution using photoelectron emission induced by a pulsed laser fo- cussed to a line on the chip-to-test, together with high speed electrostatic deflection perpendicular to the line focus. Photoelectrons produced by the line focus of pulsed laser light are imaged to a line on an array detector, the measured photoelectron in- tensities at array points along this line representing voltages at corresponding points along the line illuminated by the laser focus. High speed electrostatic deflection applied during the laser pulse, perpendicular to the direction of the line focus, disperses the line image (column) on the array detector across a sequence of sites at right angles (rows), thereby revealing the time-dependence of voltages in the column of test sites with high time resolution (in the picosecond range). Y0984028

499557

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