G - Physics – 01 – N
Patent
G - Physics
01
N
G01N 27/82 (2006.01) G01N 27/72 (2006.01) G01R 31/303 (2006.01) G01R 33/035 (2006.01) G01R 33/12 (2006.01)
Patent
CA 2183174
A nondestructive inspection equipment with increased space resolving power by shortening the distance between a superconducting detector and an object inspected. An inspection space is formed in vacuum between an inner vessel and an outer vessel of a cryostat, and a stage for scanning an objet to be inspected is formed. The inspection is carried out by evacuating the inspection space with a vacuum pump, transferring refrigerant to the inner vessel, and setting the object inspected near the inner vessel.
Chinone Kazuo
Nakayama Satoshi
Odawara Akikazu
Borden Ladner Gervais Llp
Chinone Kazuo
Nakayama Satoshi
Odawara Akikazu
Seiko Instruments Inc.
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