G - Physics – 01 – R
Patent
G - Physics
01
R
356/118, 356/188
G01R 31/26 (2006.01) G01R 31/265 (2006.01)
Patent
CA 1301954
ABSTRACT OF THE DISCLOSURE A method and apparatus are described for characterizing a semiconductor using the surface photovoltage (SPV) effect. A region of the surface of the semiconductor is illuminated with an intensity modulated beam of light, the wavelength of the light being shorter than that corresponding to the energy gap of the semiconductor. The surface photovoltage (SPV) induced in the semiconductor is measured under bias voltage conditions. The intensity of the light beam and the frequency of modulation are selected such that the surface photovoltage (SPV) is directly proportional to the intensity and reciprocally proportional to the frequency of modulation. Using the surface photovoltage (SPV) and the bias voltage (Vg) measurements, the charge induced in the semiconductor space charge region (Qsc) and the charge induced in the semiconductor (Qind) are determined. This information is used to determine various parameters of the semiconductor including surface state density and oxide/insulator charge. The technique is designed especially for use in characterizing semiconductor wafers, coated or uncoated. but may, if desired, also be used in characterizing MIS or MOS type semiconductor devices. The apparatus includes a reference electrode assembly which in one embodiment comprises a button made of insulating elastomeric material and attached to a rigid plate made of insulating material. A film made of insulating material and having a conductive coating on one side which serves as a reference electrode is attached to the button. When SPV measurements are being taken, the film is pressed against the specimen with pressure sufficient to hold the reference electrode in close compliance with the specimen, with pressure being applied to the plate from an external source and being transmitted from the rigid plate to the film through the elastomeric button.
588694
Goldfarb William C.
Kamieniecki Emil
Wollowitz Michael
Macrae & Co.
Semitest Inc.
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