Nonplanar buried-heterostructure distributed-feedback laser

Details Nonplanar buried-heterostructure distributed-feedback laser Nonplanar buried-heterostructure distributed-feedback laser

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H01L 21/66 (2006.01) H01L 21/208 (2006.01) H01L 21/36 (2006.01) H01S 5/12 (2006.01) H01S 5/227 (2006.01)

Patent

CA 1277407

NONPLANAR BURIED-HETEROSTRUCTURE DISTRIBUTED-FEEDBACK LASER Abstract A buried-heterostructure distributed feedback laser is described, including a grating structure at a surface of a nonplanar cladding layer. The grating structure can be made by transfer of a pattern by ion milling, the pattern being defined in an ion-beam resist layer, e.g., by direct-writing electron-beamexposure. Low-threshold, high-power lasers are obtained with a commercially favorable yield.

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