Nozzle for chemical vapor deposition of coatings

C - Chemistry – Metallurgy – 23 – C

Patent

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32/23, 117/52

C23C 16/54 (2006.01) C03C 17/00 (2006.01) C03C 17/245 (2006.01) C23C 16/453 (2006.01)

Patent

CA 998887

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