"null" flow sensor

Details "null" flow sensor "null" flow sensor

G - Physics

01

F

356/200, 73/3

G01F 1/20 (2006.01) G01F 1/28 (2006.01)

Patent

CA 2018124

ABSTRACT OF THE DISCLOSURE A flow sensing device includes a semiconductor substrate 31 and a pivoted beam 1. Below one half of the beam is a channel 7 running throughout the substrate 31, and below the other half of the beam is a cavity 8. During operation, a differential for,e exists acorss the beam, and the amount of force required to compensate for this differential force is indicative of the rate of fluid flow.

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