G - Physics – 02 – B
Patent
G - Physics
02
B
G02B 3/00 (2006.01) G02B 21/00 (2006.01) G02B 21/33 (2006.01) G02B 27/58 (2006.01) G11B 7/00 (2006.01) G11B 7/135 (2006.01) G11B 7/125 (2006.01)
Patent
CA 2375563
A viewing enhancement lens (18 - NAIL) which functions to increase the numerical aperture or light gathering or focusing power of viewing optics such as a microscope (26) used to view structure within a substrate such as a semiconductor wafer or chip or of imaging optics such as media recorders. The result is to increase the resolution of the system by a factor of between n, and n2, where n is the index of refraction of the lens substrate.
L'invention porte sur une lentille améliorant l'observation (18- NAIL) par le fait qu'elle augmente l'ouverture numérique d'instruments optiques d'observation à puissance de focalisation ou collecte de lumière tels qu'un microscope (26) utilisé pour observer une structure dans un substrat tel qu'une tranche ou puce de semi-conducteur ou d'instruments d'imagerie tels que des enregistreurs. Cette invention permet d'augmenter la résolution du système à l'aide d'un facteur compris entre n et n?2¿, n étant l'indice de réfraction du substrat de la lentille.
Goldberg Bennett B.
Ippolito Stephen B.
Unlu M. Selim
Ridout & Maybee Llp
Trustees Of Boston University
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