Object inspection method and apparatus with enhanced signal...

Details Object inspection method and apparatus with enhanced signal... Object inspection method and apparatus with enhanced signal...

G - Physics

01

N

358/11

G01N 23/04 (2006.01) G01N 23/18 (2006.01)

Patent

CA 1301372

13DV 09082 OBJECT INSPECTION METHOD AND APPARATUS WITH ENHANCED SIGNAL TO NOISE RATIO AND REDUCED IMAGE BLURRING ABSTRACT OF THE DISCLOSURE An object inspection apparatus and method produces images of preselected portions of an object with increased signal to noise ratio and reduced blurring. In a preferrred embodiment, this is accomplished through the use of a novel software averaging routine residing in a computer.

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