Olefinically unsaturated onium salts

Details Olefinically unsaturated onium salts Olefinically unsaturated onium salts

C - Chemistry, Metallurgy

07

F

C07F 9/68 (2006.01) C07C 69/653 (2006.01) C07C 69/78 (2006.01) C07C 381/12 (2006.01) C07F 9/92 (2006.01) C07F 9/94 (2006.01) C08F 220/38 (2006.01) G03F 7/038 (2006.01) G03F 7/039 (2006.01)

Patent

CA 2049772

K-18217/A Olefinically unsaturated onium salts Abstract of the Disclosure Olefinically unsaturated onium salts of formulae I and II Image (I) Image (II), wherein R1 is a hydrogen atom or methyl and A is a direct bond, phenylene or a radical Image or Image , wherein n and o are each independently of the other an integer from 1 to 10, Y1 is -I- or ?-R2 and Y2 is ?-R2, wherein R2 is C1-C4alkyl, unsubstituted or C1-C4alkylsubstituted phenyl, m is 0 or an integer from 1 to 10, and X is BF4, PF6, AsF6, SbF6, SbCl6, FeCl4, SnF6, BiF6, CF3SO3 or SbF5OH, can be copolymerised with an olefinically unsaturated comonomer containing an acid-labile group, and give radiation-sensitive copolymers which can be used direct as photoresists.

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