H - Electricity – 01 – L
Patent
H - Electricity
01
L
H01L 31/0216 (2006.01) G01J 1/02 (2006.01) G01J 1/04 (2006.01) G01J 3/12 (2006.01) G01J 3/26 (2006.01) G01J 3/51 (2006.01) G02B 5/18 (2006.01) H01L 21/00 (2006.01) H01L 31/028 (2006.01) H01L 31/10 (2006.01)
Patent
CA 2355217
A optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.
Détecteur optique à base de silicium, doté d'une couche filtre poreuse à effet filtre pouvant être latéralement modifié, qui comporte une pluralité de contacts photodétecteurs constitués d'un seul tenant avec ledit détecteur, ainsi que procédé de fabrication d'un détecteur optique par application d'une couche d'isolation sur la couche filtre poreuse et maintien de zones filtres actives.
Arens-Fischer Rudiger
Hunkel Dirk
Marso Michel
Fetherstonhaugh & Co.
Forschungszentrum Julich Gmbh
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