Optical device and method of manufacturing the same

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H01S 3/081 (2006.01) G02B 3/00 (2006.01) G02B 6/124 (2006.01) G02F 1/37 (2006.01) G03F 7/00 (2006.01) G03F 7/30 (2006.01) H01S 3/05 (2006.01) H01S 3/06 (2006.01) H01S 3/23 (2006.01) H01S 5/10 (2006.01) H01S 5/183 (2006.01)

Patent

CA 2071598

At least one convex arcuate face (or concave arcuate face) is formed by photolithography on a photoresist layer formed on a surface of an optical device constituted from an optical material, and the surface of the optical device and the photoresist film are etched continuously or stepwise to form on the surface of the optical device at least one convex arcuate face (or concave arcuate face) similar to the convex arcuate face (or concave arcuate face) of the photoresist film. In case the optical material is polished into a mirror face, a photoresist film is formed on the polished face, and the polished face and the photoresist film are etched uniformly. An optical device obtained in this manner is used for a laser oscillator, a monolithic laser system, a non-linear optical device, a microlens, a ring laser and so forth. On the other hand, a plurality of reflecting portions are provided on each of a pair of opposing faces of a light transmitting optical material, and a reflecting portion of at least one of the faces is formed from a convex arcuate face formed on the surface of the light transmitting optical material. A zigzag optical path is formed between the reflecting portions of the opposing faces of the light transmitting optical material such that it couples the reflecting portions alternately to each other, thereby to obtain an optical device having a long optical path. The optical device is employed as a higher harmonic wave converting device for light of a high efficiency for a short wavelength laser apparatus.

Au moins une face convexe (ou concave) est formée par photolithographie sur un film photo-résistante d'une surface d'un élément optique constitué à partir de matériel optique, la surface et le film sont gravés continuellement ou séquentiellement pour former sur la surface au moins une face convexe (ou concave) similaire à celle retrouvée sur le film photo-résistant. Lorsque le matériel optique est poli pour produire un miroir, un film photo-résistant est formé sur la face polie et celle-ci et le film photo-résistant sont gravés uniformément. Un élément optique obtenu de cette façon est utilisé comme un oscillateur laser, un système de laser monolithique, un élément optique non-linéaire, une micro-lentille, un laser à anneaux, etc.. Par ailleurs, une pluralité de portions réflectrices sont présentes sur chaque paire de faces opposées d'un matériel optique transmetteur de lumière, et un portion réflectrice d'au moins l'un des faces est formée par une face convexe formée sur la surface du matériel optique. Un chemin optique en zig-zag est formé entre les portions réflectrices des faces opposées du matériel optique de façon à ce qu'il couple les portions réflectrices alternativement pour obtenir un élément optique ayant un long chemin optique. L'élément optique est employé comme un système convertisseur d'ondes harmoniques élevées pour une lumière de haute efficacité pour un appareil laser à courte longueur d'onde.

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