Optical device with confocal beam path

Details Optical device with confocal beam path Optical device with confocal beam path

H - Electricity

01

J

H01J 37/26 (2006.01) G01B 9/04 (2006.01) G02B 21/00 (2006.01)

Patent

CA 2054928

Abstract: Optical Device With Confocal Beam Path For Three-Dimensional Examination of an Object (Figure 1) A device is described for three-dimensional examination with a confocal beam path, in which an illumination grid (12; 22; 31; 83) is imaged in a focal plane (13f; 87), said plane being located on or in the vicinity of surface (14o) of object (14). The radiation reflected in the focal plane is imaged directly by a beam splitter onto the receiving surface of a CCD receiver (17; 91). The illumination grid (12; 22; 31; 83) is then imaged on the receiver surface either by the photosensitive areas of the receiver acting as confocal diaphragms or by signals from the detector elements which only receive light directed outside focal plane (13f; 87) not being taken into account in the evaluation or being taken into account separately. The illumination grid size generated in focal plane (13f; 87) can be either fixed or variable. A variable illumination grid size can be produced for example by an LED array. The device also makes examinations in transmitted light possible. 26

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