G - Physics – 01 – B
Patent
G - Physics
01
B
352/32.21, 88/94
G01B 11/14 (2006.01) G03F 7/20 (2006.01) G03F 9/00 (2006.01)
Patent
CA 1139441
15.1.80 1 PHN 9487 ABSTRACT: Optical imaging system provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed. An optical imaging system is described which is provided with an opto-electronic detection system for determining a deviation between the image plane of the imaging system and a second plane on which an image is to be formed by the imaging system. After a first reflection on the second plane an auxiliary beam which is obliquely incident on said plane is reflected along itself and mirror-inverted, is sub- sequently reflected a second time on the second plane, and is finally incident on two detectors. The dif- ference signal of the detectors, which is a measure of the said deviation, is independent of a tilted position of the second plane and of local differences in reflection in said plane.
353625
Fahner Theodorus A.
Wittekoek Stefan
Fetherstonhaugh & Co.
N.v. Philips Gloeilampenfabrieken
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