Optical measuring device

Details Optical measuring device Optical measuring device

G - Physics

01

B

354/25, 33/60

G01B 11/06 (2006.01)

Patent

CA 1295829

ABSTRACT OF THE DISCLOSURE An optical measuring device for measuring a thickness of a workpiece or a height of a step thereof comprises a pair of deviation measuring means disposed in opposing relation to the workpiece, a pulse generating circuit for producing alternative pulse signals to control the deviation measuring means and signal processing means for adding outputs of the deviation measuring means each including an optical position detecting element having a light receivig plane disposed on an optical axis having a predetermined angle with respect to an optical axis of light beam irradiating the workpiece, a laser light source for emitting the light beam, a drive circuit responsive to the pulse signal to control the laser light source such that the optical position detecting element is irradiated with the light beam alternatively so that the deviation measuring means is operable only when the laser light source is emitting the light beam.

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